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Nitrogen Trifluoride NF3 Gas , Specialty Gases For Plasma Etching Of Silicon Wafers Colorless

Categories Specialty Gases
Brand Name: TYHJ
Model Number: NF3
Certification: ISO Certificate
Place of Origin: China
MOQ: 200pcs
Price: negotiable
Payment Terms: L/C, T/T, D/A, D/P, Western Union
Supply Ability: 10000KG per month
Delivery Time: 15-30 working days after receipt of deposit
Packaging Details: 1. 44Ltr Cylinder filling with 20Kg NF3 Liquid. 2. 440L cylinder filling with 200Kg NF3 Liquid.
CAS No.: 7783-54-2
EINECS No.: 232-007-1
UN No.: UN2451
Purity: 99.995%
Dot Class: 2.2
Appearance: colorless
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    Nitrogen Trifluoride NF3 Gas , Specialty Gases For Plasma Etching Of Silicon Wafers Colorless


    Nitrogen Trifluoride NF3 Gas , Specialty Gases For Plasma Etching Of Silicon Wafers Colorless


    Nitrogen trifluoride is the inorganic compound with the formula NF3. This nitrogen-fluorine compound is a colorless, odorless, nonflammable gas. It finds increasing use as an etchant in microelectronics. Nitrogen trifluoride is an extremely strong greenhouse gas.




    Specifications


    CAS No.: 7783-54-2

    EINECS No.: 232-007-1

    UN No.: UN2451

    Purity: 99.995%

    Dot Class: 2.2

    Appearance: Colorless

    Grade Standard: Electron Grade

    Specification≥99.995%
    CF4≤40 ppm
    N2≤5 ppm
    O2+Ar≤5 ppm
    CO≤5 ppm
    CO2/
    N2O/
    SF6≤2 ppm
    H2O≤1 ppm
    HF≤1 ppm

    Typical Application


    Etching:


    Nitrogen Trifluoride is used in the plasma etching of silicon wafers.

    NF3



    Packaging & Shipping


    Package Size44Ltr Cylinder440Ltr CylinderISO Tank
    Filling Net Weight/Cyl20Kgs200Kgs/
    QTY Loaded in 20’Container200 Cyls20 Cyls
    Total Net Weight4 Tons4 Tons
    Cylinder Tare Weight50Kgs240Kgs
    ValveCGA/DISS640

    Quality Nitrogen Trifluoride NF3 Gas , Specialty Gases For Plasma Etching Of Silicon Wafers Colorless for sale
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